Reactive ion etching of crystalline quartz for SAW devices
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. Redeposition: a factor in ion-beam etching topography
2. Application of ion-etching of grooves into quartz for surface acoustic wave devices
3. Argon and reactive ion beam etching for SAW devices
4. Proc Int Ion Eng Cong ISIAT'83 & IPAT'83;Matsuo,1983
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