Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
12 articles.
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1. Diamond micro-milling of lithium niobate for sensing applications;Journal of Micromechanics and Microengineering;2016-07-01
2. Effect of MeV O2+ implantation on the reactive ion etch rate of LiTaO3;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-11
3. Enhancement of the etch rate of LiNbO3 by prior bombardment with MeV O2+ ions;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-11
4. Precision in-Situ Frequency Trimming Process of Surface Transverse Wave Resonators;Nano-Crystalline and Thin Film Magnetic Oxides;1999
5. Reactive ion etching of piezoelectric materials in CF4/CHF3 plasmas;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-07