Electron energy distribution function in a dc magnetron sputtering discharge
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference23 articles.
1. Growth of TaC thin films by reactive direct current magnetron sputtering: Composition and structure
2. Optical constants of amorphous hydrogenated carbon and silicon-carbon alloy films and their application in high temperature solar selective surfaces
3. Plasma polymerization by magnetron glow discharge. II. Effect of magnetic field on chemical characteristics of plasma polymers of tetrafluoroethylene revealed by electron spectroscopy for chemical analysis
4. Sputtering systems with magnetically enhanced ionization for ion plating of TiN films
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