XHV integrated process with magnetic levitation transports
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference5 articles.
1. Extremely-High Vacuum System for the Long-distance Transport System.
2. Extremely high vacuum system for long-distance transport
3. Magnetic Levitation Transport System for Extremly High Vacuum.
4. Magnetic Leviation Transport Using Superconducting Oxide.
5. Construction and Performance Test of a Magnetically Levitated Transport System in Vacuum Using High- T c Superconductors
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