Sustained self sputtering of different materials using dc magnetron
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference5 articles.
1. A highest rate self-sputtering magnetron source
2. Low pressure magnetron sputtering using ionized, sputtered species
3. Sustained self‐sputtering using a direct current magnetron source
4. SVC 37th Conference;Radzimski,1994
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