1. Prospects of the automation for ULSI manufacturing;Aoki,1990
2. Simulation tool for design and management optimization of automated interbay material handling and storage systems for large Wafer Fab;Cardarelli;IEEE Trans. Semiconductor Mfng,1995
3. Performances analyses for intrabay material handling automation in MOS memory production;Cardarelli;Assembly Automn,1993
4. Factory automation of front-end processing for VLSI fabrication;Hayashi,1988
5. The future of automation for high volume wafer fabrication and ASIC manufacturing;Hughes,1986