Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab-Reference-Cited by-同舟云学术

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Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab

Published:1995 Issue:1 Volume:8 Page:44-49
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Cardarelli E.,Pelagagge P.M.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx3/66/8075/00350756.pdf?arnumber=350756

Cited by 45 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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5. A pre-dispatching vehicle method for a diffusion area in a 300 mm wafer fab;Journal of Industrial and Production Engineering;2016-05-04

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