Author:
Jung Kwang Suk,Baek Yoon Su
Subject
Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
Reference20 articles.
1. Kim HR. Fine angle calibration device and its method of the exposure equipment stage using a planar step motor. Korea Patent No. 0,136,427, 1998
2. High-precision magnetic levitation stage for photolithography;Kim;Precis. Eng.,1998
3. Contactless magnetically levitated silicon wafer transport system;Park;Mechatronics,1996
4. A new maglev system for magnetically levitated carrier system;Morishita;IEEE Trans. Veh. Technol.,1989
5. A magnetic levitation transport path;Albert Wang;IEEE Trans. Semicond. Manuf.,1991
Cited by
22 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献