Author:
Chan Philip C.H,Yan Gui-zhen,Sheng Lie-yi,Sharma Rajnish K,Tang Zhenan,Sin Johnny K.O,Hsing I-Ming,Wang Yangyuan
Subject
Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Guizhen Yan, Philip C.H. Chan, I-Ming Hsing, Rajnish K. Sharma, Johnny K.O. Sin, An improved TMAH etching silicon method without attacking exposed aluminum, in: Proceedings of the MEMS’2000.
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