A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Author:

Sheng Lie-yi,Tang Zhenan,Wu Jian,Chan Philip C.H.,Sin Johnny K.O.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Wan-Young Chung, Tae-Hoon Kim, Young-Ho Hong, Duk-Dong Lee, Characterization of porous tin oxide thin films and their application to microsensor fabrication, Sensors and Actuators B, 24–25 (1995) 482–485.

2. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing;Suehle;IEEE Electron Device Lett.,1993

3. Qinghai Wu, Wen H. Ko, Micro-gas sensor for monitoring anesthetic agents, Sensors and Actuators B, 1 (1990) 183–187.

4. S. Semancik, R.E. Cavicchi, K.G. Kreider, J.S. Suehle, P. Chaparala, Selected-area deposition of multiple active films for conductometric microsensor arrays, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 25–29, 1995, pp. 831–834.

5. Design and analysis of a micro-hotplate for integrated gas sensor applications;Fung;Sensors and Actuators A,1996

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