Coupling of an electrodialyzer with inductively coupled plasma mass spectrometry for the on-line determination of trace impurities in silicon wafers after surface metal extraction-Reference-Cited by-同舟云学术

Coupling of an electrodialyzer with inductively coupled plasma mass spectrometry for the on-line determination of trace impurities in silicon wafers after surface metal extraction

Published:2010-02 Issue:8 Volume:1217 Page:1362-1367
ISSN:0021-9673
Container-title:Journal of Chromatography A
language:en
Short-container-title:Journal of Chromatography A

Author:

Chang I-long,Hsu I-hsiang,Yang Mo-hsiung,Sun Yun-chang

Publisher

Elsevier BV

Subject

Organic Chemistry,General Medicine,Biochemistry,Analytical Chemistry

Reference29 articles.

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4. Determination of trace metallic impurities on 200-mm silicon wafers by time-of-flight secondary-ion-mass spectroscopy

5. Accuracy of Total Reflection X-Ray Fluorescence Spectrometry near the Detection Limit.

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