Applications of Hadamard transform-gas chromatography/mass spectrometry for the detection of hexamethyldisiloxane in a wafer cleanroom
Author:
Funder
National Science Council
Publisher
Elsevier BV
Subject
Organic Chemistry,General Medicine,Biochemistry,Analytical Chemistry
Reference51 articles.
1. Y. M. Kawasaki, A. Miyaji, USA Patent: 5,430,303 (1995).
2. A comparison of some approximations for the Fermi-Dirac integral of order
3. Airborne contamination of a chemically amplified resist. 1. Identification of problem
4. Experimentation and modeling of organic photocontamination on lithographic optics
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