Performance evaluation of a simultaneous electrocoagulation and electrofiltration module for the treatment of Cu-CMP and oxide-CMP wastewaters-Reference-Cited by-同舟云学术

Performance evaluation of a simultaneous electrocoagulation and electrofiltration module for the treatment of Cu-CMP and oxide-CMP wastewaters

Published:2006-12 Issue:1-2 Volume:286 Page:36-44
ISSN:0376-7388
Container-title:Journal of Membrane Science
language:en
Short-container-title:Journal of Membrane Science

Author:

Yang Gordon C.C.,Tsai Chi-Ming

Publisher

Elsevier BV

Subject

Filtration and Separation,Physical and Theoretical Chemistry,General Materials Science,Biochemistry

Reference32 articles.

1. Evaluating and treating CMP wastewater;Golden;Semicond. Int.,2000

2. Treating wastewater from CMP using ultrafiltration;Browne;MICRO,1999

3. Targeting water use for chemical mechanical polishing;Corlett;Solid State Technol.,2000

4. CMP wastewater management using the concepts of design for environment;Yang;Environ. Prog.,2002

5. Chemistry of CMP Wastewater;Golden,2001

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