Mechanical deformation of PZT thin films for MEMS applications
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference12 articles.
1. Ferroelectric Thin Films in Micro-electromechanical Systems Applications
2. Solution Deposition of Ferroelectric Thin Films
3. Mechanical Behavior of a Mems Acoustic Emission Sensor
4. J.S. Wright, L.F. Francis, J. Electroceram. (1998) in press.
5. Nonlinear Deformation of Ferroelectric Ceramics
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