Intrinsic stress evolution in diamond films prepared in a CH4H2NH3 hot filament chemical vapor deposition system-Reference-Cited by-同舟云学术

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Intrinsic stress evolution in diamond films prepared in a CH4H2NH3 hot filament chemical vapor deposition system

Published:2000-07 Issue:7 Volume:9 Page:1388-1392
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Shang N.G,Lee C.S,Lin Z.D,Bello I,Lee S.T

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Diamond-Ceramic Coating of the Future

2. Diamond and diamondlike films: Deposition processes and properties

3. On the nature of extended defects in CVD diamond and the origin of compressive stresses

4. Stress distribution around the ion-induced channels in chemical vapor deposited diamond films: a micro-Raman study

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films;Acta Materialia;2024-01

2. Delamination/Rupture of Polycrystalline Diamond Film: Defining Role of Shear Anisotropy;Crystal Growth & Design;2017-03-14

3. A METHOD FOR DEFINING INITIAL STRESS IN PROGRESSIVELY DEPOSITED FILM ON A SUBSTRATE;International Journal of Modern Physics B;2014-03-10

4. Large-Area Cylindrical Diamond Electrodes;ECS Journal of Solid State Science and Technology;2012

5. Simulation of the Young’s Modulus Anisotropy in CVD Diamond Film;Materials Science Forum;2011-12

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