Optical and surface analysis of DC-reactive sputtered AlN films-Reference-Cited by-同舟云学术

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Optical and surface analysis of DC-reactive sputtered AlN films

Published:2003-08 Issue:8 Volume:12 Page:1315-1321
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Mahmood A.,Machorro R.,Muhl S.,Heiras J.,Castillón F.F.,Farı́as M.H.,Andrade E.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference39 articles.

1. Optical constants of epitaxial AlGaN films and their temperature dependence

2. A. Mahmood, N. Rakov, M. Xiao, Mater. Lett., in press

3. Wide bandgap semiconductor materials and devices

4. Growth temperature effect on the optical and material properties of AlxInyGa1−x−yN epilayers grown by MOCVD

5. The low temperature catalyzed chemical vapor deposition and characterization of aluminum nitride thin films

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