Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition-Reference-Cited by-同舟云学术

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Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition

Published:2002-08 Issue:8 Volume:11 Page:1491-1495
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Liu Dongping,Xu Yong,Yang Xuefeng,Yu Shiji,Sun Qi,Zhu Aimin,Ma Tengcai

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Diamond-like carbon

2. Diamond-like carbon: state of the art

3. Properties of Tetrahedral Amorphous Carbon Deposited by A Filtered Cathodic Vacuum ARC

4. Ion energy and momentum flux dependence of diamond-like carbon film synthesis in radio frequency discharges

5. Characterization and Optical Investigation of Diamondlike Carbon Prepared by Electron Cyclotron Resonance Plasma

Cited by 34 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Discharge Characteristics of Dual-Frequency Capacitively Coupled Ar/Ch4 Plasma Diagnostics by Optical Emission Spectroscopy;2024

2. Thedischarge Characteristics of Dual-Frequency Capacitively Coupled Ar/Ch4 Plasma Diagnostics by Optical Emission Spectroscopy;2023

3. Deposition of diamond-like carbon coatings: Conventional to non-conventional approaches for emerging markets;Ceramics International;2021-10

4. In-situ diagnosis of Ar/CH₄ helicon wave plasma for synthesis of carbon nanomaterials;Acta Physica Sinica;2021

5. Synthesis of smooth low friction graphitic nanoparticle film by vacuum arc deposition;Diamond and Related Materials;2020-11

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