Author:
Ji Pei-Yu,Huang Tian-Yuan,Chen Jia-Li,Zhuge Lan-Jian,Wu Xue-Mei, , , ,
Abstract
A variety of carbon-based thin films are prepared by self-developed helicon wave plasma chemical vapor deposition (HMHX, HWP-CVD) through changing the parameters of plasma discharge. The Ar/CH<sub>4</sub> plasma discharge is diagnosed <i>in situ</i> by Langmuir probe, emission spectroscopy and mass spectrometry. The carbon thin films are characterized by scanning electron microscopy (SEM) and Raman spectroscopy (Raman). The results show that under the given parameters, the plasma discharge modes are all helicon wave discharge modes. Under a given CH<sub>4</sub> flow rate, the energy distribution in the plasma is enough to dissociate the methane molecules and form carbon free radicals. The preparation of different carbon-based films is realized by adjusting the CH<sub>4</sub> fluence. The research result shows that when the plasma is rich in CH and H radicals, it is suitable for growing diamond-like carbon films. When the plasma is rich in C<sub>2</sub> radicals and less H, it is favorable for growing vertical graphene nanosheets. According to the results of plasma diagnosis and material characterization, the decomposition mechanism of methane molecules under the action of Ar helicon wave plasma (HWP) is proposed, and the growth model of carbon-based materials is established, the feasibility of Ar/CH<sub>4</sub>-HWP in the preparation of carbon-based nanomaterials is verified, which provides a reference for preparing the carbon-based materials by HWP-CVD technology.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Reference31 articles.
1. Dennison J R, Mark H, Greg S 1996 Spectroscopy 11 38
2. Roger N 2019 Encyclopedia of Biomedical Engineering (1st Ed.) (Amsterdam: Elsevier) p52
3. Robertson J 2002 Mater. Sci. Eng., R 37 129
4. Cheng C Y, Teii K 2012 IEEE Trans. Plasma Sci. 40 1783
5. Aisenberg S, Chabot R 1971 J. Appl. Phys. 42 2953
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