Influence of interfacial copper during the dealloying and nitridation of Cu-Ti films
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference14 articles.
1. Thin Solid Films, Special Issue on Copper Metallization,1995
2. Enhanced adhesion of copper to dielectrics via titanium and chromium additions and sacrificial reactions
3. Formation of TiN‐encapsulated copper structures in a NH3ambient
4. Passivation of Cu via refractory metal nitridation in an ammonia ambient
5. Reaction kinetics in the Ti/SiO2system and Ti thickness dependence on reaction rate
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Nano-layered-structure interface between Sn-Ti alloy and quartz glass for hermetic seals;Materials Letters;2019-02
2. Surface oxide reduction and bilayer molecular assembly of a thiol-terminated organosilane on Cu;Applied Physics Letters;2005-07-04
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