Author:
Vainonen-Ahlgren E.,Tois E.,Ahlgren T.,Khriachtchev L.,Marles J.,Haukka S.,Tuominen M.
Subject
Computational Mathematics,General Physics and Astronomy,Mechanics of Materials,General Materials Science,General Chemistry,General Computer Science
Reference19 articles.
1. Pushing the Limits
2. G. Timp, J. Bude, K.K. Bourdelle, J. Garno, A. Ghetti, H. Gossmann, M. Green, G. Forsyth, Y. Kim, R. Kleimann et al., IEDM Tech. Dig. 1999, p. 55
3. Hafnium and zirconium silicates for advanced gate dielectrics
4. Electrical properties of hafnium silicate gate dielectrics deposited directly on silicon
5. Stable zirconium silicate gate dielectrics deposited directly on silicon
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献