Pulsed KrF excimer laser annealing of silicon solar cell-Reference-Cited by-同舟云学术

Pulsed KrF excimer laser annealing of silicon solar cell

Published:2002-10 Issue:1-4 Volume:74 Page:289-294
ISSN:0927-0248
Container-title:Solar Energy Materials and Solar Cells
language:en
Short-container-title:Solar Energy Materials and Solar Cells

Author:

Azuma H.,Takeuchi A.,Ito T.,Fukushima H.,Motohiro T.,Yamaguchi M.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. J.H. Werner, R.B. Bergmann, Perspectives of crystalline silicon thin film solar cells, Technical Digest PVSEC-11 24-A-2-1, 1999.

2. Excimer laser crystallization and doping of silicon films on plastic substrates;Smith;Appl. Phys. Lett.,1997

3. Poly silicon TFT annealing with XeCl excimer laser;Shida;Rev. Laser Eng.,2000

4. F. Takeuchi, Y. Takizawa, S. Noda, Y. Mishima, Transient thermal analysis of excimer laser annealed poly crystalline Si films, International Workshop on Active-matrix Liquid-crystal Displays (AM-LCD99), 1999, pp. 169–172.

5. Growth of micro-crystalline silicon film by electron beam excited plasma chemical vapor deposition without hydrogen dilution;Imaizumi;J. Vac. Sci. Technol. A,1998

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