Power consumption benchmark for a semiconductor cleanroom facility system-Reference-Cited by-同舟云学术

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Power consumption benchmark for a semiconductor cleanroom facility system

Published:2008-01 Issue:9 Volume:40 Page:1765-1770
ISSN:0378-7788
Container-title:Energy and Buildings
language:en
Short-container-title:Energy and Buildings

Author:

Hu Shih-Cheng,Wu Jen-Syua,Chan David Yih-Liang,Hsu Rich Tsung-Chi,Lee Jane Car-Cheng

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Building and Construction,Civil and Structural Engineering

Reference13 articles.

1. http://www.semi.org.

2. International Technology Roadmap (ITRS) for Semiconductors, Environment, Safety, and Health, 2000 Update.

3. Makeup air systems energy-saving opportunities;Brown;ASHRAE Transactions,1990

4. Fan efficiency vs. unit efficiency for cleanroom application;Hunt;ASHRAE Transactions,1990

5. Ultrasonic humidification: system integration, energy, and indoor air quality engineering issues;Mumma;ASHRAE Transactions,1997

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