1. http://www.semi.org.
2. International Technology Roadmap (ITRS) for Semiconductors, Environment, Safety, and Health, 2000 Update.
3. Makeup air systems energy-saving opportunities;Brown;ASHRAE Transactions,1990
4. Fan efficiency vs. unit efficiency for cleanroom application;Hunt;ASHRAE Transactions,1990
5. Ultrasonic humidification: system integration, energy, and indoor air quality engineering issues;Mumma;ASHRAE Transactions,1997