Application of femtosecond laser etching in the fabrication of bulk SiC accelerometer
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Surfaces, Coatings and Films,Biomaterials,Ceramics and Composites
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1. Application of bulk silicon carbide technology in high temperature MEMS sensors;Materials Science in Semiconductor Processing;2024-04
2. Femtosecond Laser-Induced Phase Transformation on Single-Crystal 6H-SiC;Micromachines;2024-02-06
3. Temperature Characteristics of 4H-SiC Substrate and Thin-Film Resistor Applied in MEMS Piezoresistive Sensors;IEEE Sensors Journal;2023-12-15
4. A MEMS All‐SiC Accelerometer and its Application in Vibration Test of Aero‐Engine†;IEEJ Transactions on Electrical and Electronic Engineering;2023-11-10
5. High Temperature Characteristics of Piezoresistive Silicon Carbide Pressure Sensors Implemented by Leadless Packaging;2023 IEEE SENSORS;2023-10-29
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