Introduction to MEMS Devices-Reference-Cited by-同舟云学术

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Introduction to MEMS Devices

Published:2005 Issue: Volume: Page:1-32
ISSN:
Container-title:Analysis and Design Principles of MEMS Devices
language:
Short-container-title:

Author:

Bao Minhang

Publisher

Elsevier

Reference30 articles.

1. VLSI Technology,1988

2. Semiconductor Sensors,1994

3. Silicon Sensors and Micro Structures;Brysek,1990

4. Piezoresistance in germanium and silicon;Smith;Physics Review,1954

5. Silicon diffused-element piezoresistive diaphragms;Tufte;Journal of Applied Physics,1962

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