Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions
Author:
Publisher
Springer Science and Business Media LLC
Subject
Bioengineering,Biophysics,Biotechnology
Link
https://link.springer.com/content/pdf/10.1007/s42235-022-00159-3.pdf
Reference144 articles.
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5. Sadeghpour, S., Kraft, M., and Puers, R. (2019). Design and fabrication of a piezoelectric micromachined ultrasound transducer (pMUT) array for underwater communication, in 2019 International Congress on Ultrasonics, ICU 2019, September 3, 2019–September 6, 2019, p. 045006
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