Structural characteristics of diamond-like nanocomposite films grown by PECVD-Reference-Cited by-同舟云学术

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Structural characteristics of diamond-like nanocomposite films grown by PECVD

Published:2003-07 Issue:21 Volume:57 Page:3305-3310
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Yang Won Jae,Choa Yong-Ho,Sekino Tohru,Shim Kwang Bo,Niihara Koichi,Auh Keun Ho

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference19 articles.

1. Diamond-like carbon

2. Tribological characteristics of DLC films and duplex plasma nitriding/DLC coating treatments

3. Characterization of ion-beam-deposited diamond-like carbon films

4. Influence of silicon on the physical properties of diamond-like films

5. Thermal stability of diamond-like carbon films with added silicon

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2. Nanostructured Carbon Films Obtained by CH4 Plasma Deposition and Annealing at High Temperatures: Structural Features and Their Influence on the Electrical and Optoelectronic Properties;Optics and Spectroscopy;2023-12

3. Field-Frequency Variation during Plasma-Chemical Deposition of Silicon–Carbon Films as a Method for Their Structural Modification;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-10

4. Field Frequency Variation during Plasma-Chemical Deposition of Silicon-Carbon Films as a Method for Their Structural Modification;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2023-10-01

5. Nanostructured carbon films obtained by CH4 plasma deposition and annealing at high temperature: structural features and their effects on electrical and optoelectronic properties;Arctic and Subarctic Natural Resources;2023-09-26

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