In situ monitoring of pulsed laser indium–tin-oxide film deposition by optical emission spectroscopy
Author:
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference19 articles.
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3. Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings;Lippens;Thin Solid Films,1998
4. Deposition of indium tin oxide films by laser ablation: processing and characterization;Calı̀;Solid-State Electron.,1998
5. Vacuum-deposited, nonpolymeric flexible organic light-emitting devices;Gu;Opt. Lett.,1997
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