Sputtering of indium-tin oxide
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference5 articles.
1. these Proceedings;Howson,1997
2. The formation and control of direct current magnetron discharges for the high‐rate reactive processing of thin films
3. The reactive sputtering of oxides and nitrides
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5. Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Fundamentals and Applications;Howson,1993
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2. Active Soldering of Indium Tin Oxide (ITO) With Cu in Air Using an Sn3.5Ag4Ti(Ce, Ga) Filler;Journal of Materials Engineering and Performance;2003-08-01
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4. Effects of plasma treatment on the electrical and optical properties of indium tin oxide films fabricated by r.f. reactive sputtering;Thin Solid Films;2001-05
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