Three-dimensional density profiles of sputtered atoms and ions in a direct current glow discharge: experimental study and comparison with calculations-Reference-Cited by-同舟云学术

Three-dimensional density profiles of sputtered atoms and ions in a direct current glow discharge: experimental study and comparison with calculations

Published:1997-02 Issue:2 Volume:52 Page:205-218
ISSN:0584-8547
Container-title:Spectrochimica Acta Part B: Atomic Spectroscopy
language:en
Short-container-title:Spectrochimica Acta Part B: Atomic Spectroscopy

Author:

Bogaerts A.,Wagner E.,Smith B.W.,Winefordner J.D.,Pollmann D.,Harrison W.W.,Gijbels R.

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference46 articles.

1. Glow discharge mass spectrometry;Harrison,1988

2. Glow Discharge Spectroscopies;Marcus,1993

3. Role of sputtered Cu atoms and ions in a direct current glow discharge: Combined fluid and Monte Carlo model

4. Two-Dimensional Model of a Direct Current Glow Discharge: Description of the Argon Metastable Atoms, Sputtered Atoms, and Ions

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