Two-Dimensional Model of a Direct Current Glow Discharge: Description of the Argon Metastable Atoms, Sputtered Atoms, and Ions
Author:
Affiliation:
1. Department of Chemistry, University of Antwerp (UIA), Universiteitsplein 1, B-2610 Wilrijk-Antwerp, Belgium
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac951206z
Reference40 articles.
1. Glow Discharge Spectroscopies
2. Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method
3. Modeling of metastable argon atoms in a direct-current glow discharge
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