Effects of Substrate Temperature on Microstructure and Tribological Properties of Ti-Al-Si-Cu-N Films Deposited by Magnetron Sputtering
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Published:2017-06
Issue:6
Volume:46
Page:1497-1502
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ISSN:1875-5372
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Container-title:Rare Metal Materials and Engineering
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language:en
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Short-container-title:Rare Metal Materials and Engineering
Author:
Changjie Feng,En Chen
Cited by
4 articles.
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