Structural and optical evolution of Ga2O3/glass thin films deposited by radio frequency magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference28 articles.
1. GasFET for the detection of reducing gases
2. Electrical doping of gas-sensitive, semiconducting Ga2O3 thin films
3. Preparation of highly transparent and conducting Ga2O3–In2O3 films by direct current magnetron sputtering
4. Optical evidence of intrinsic quantum wells in the transparent conducting oxide β-Ga2O3
5. Gallium oxide films for filter and solar-blind UV detector
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2. Deposition of Ga2O3 thin films by liquid metal target sputtering;Vacuum;2023-03
3. Effects of post-deposition annealing temperatures in argon ambient on structural, optical, and electrical characteristics of RF magnetron sputtered gallium oxide films;Journal of Materials Research and Technology;2023-01
4. Crystallization and bandgap variation of non-stoichiometric amorphous Ga2O3-x thin films during post-annealing process;Applied Surface Science;2022-05
5. Solar‐Blind Ultrathin Sn‐Doped Polycrystalline Ga 2 O 3 UV Phototransistor for Normally Off Operation;Advanced Photonics Research;2022-03-23
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