Author:
Kim Seongjun,Kim Hong-Ki,Jeong Seonghoon,Kang Min-Jae,Kang Min-Sik,Lee Nam-Suk,Cuong Tran Viet,Koo Sang-Mo,Kim Hyunsoo,Shin Hoon-Kyu
Funder
NRF
Korea Institute of Energy Technology Evaluation and Planning
MOTIE
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
2 articles.
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1. Application of bulk silicon carbide technology in high temperature MEMS sensors;Materials Science in Semiconductor Processing;2024-04
2. Fabrication of SiC MEMS Sensors;Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors;2018