Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference11 articles.
1. Design and evaluation of tribological coatings
2. Corrosion of CrN and TiAlN coatings in chloride-containing atmospheres
3. Structure and properties of the TiN and Ti(C,N) coatings deposited in the PVD process on high-speed steels
4. The effect of the substrate on the mechanical properties of TiN coatings
5. Mechanical properties of TiN/TiB2 multilayers deposited by plasma enhanced chemical vapor deposition
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3. Optical, electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation;Surface and Coatings Technology;2021-05
4. Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation;The Journal of Physical Chemistry C;2020-11-05
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