Effect of working pressure and annealing temperature on single-phase AlN films
Author:
Funder
Heilongjiang Province Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference15 articles.
1. Growth assessment of (002)-oriented AlN thin films on Ti bottom electrode deposited on silicon and kapton substrates;Signore;Mater. Des.,2017
2. Improvement in fracture strength in electrically conductive AlN ceramics with high thermal conductivity;Kusunose;Ceram. Int.,2016
3. Enhancing the piezoelectric properties of flexible hybrid AlN materials using semi-crystalline parylene;Jackson;Smart Mater. Struct.,2017
4. Vacuum deposition of AlN acoustic transducers;Wauk;Appl. Phys. Lett.,1968
5. Influence of the growth temperature of AlN nucleation layer on AlN template grown by high-temperature MOCVD;Chen;Mater. Lett.,2014
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of gamma-ray irradiation on material and electrical properties of AlN gate dielectric on 4H-SiC;Nanotechnology;2024-04-23
2. Influence of argon/nitrogen sputtering gas and molybdenum/titanium seed layer on aluminium nitride ⟨100⟩ thin film growth using ceramic target;Journal of Materials Research and Technology;2024-03
3. Growth of Thin AlN Films on Si Wafers by Reactive Magnetron Sputtering: Role of Processing Pressure, Magnetron Power and Nitrogen/Argon Gas Flow Ratio;Crystals;2022-09-28
4. Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering;Journal of Materials Science: Materials in Electronics;2022-04-19
5. Influence of Pulsed DC Sputtering Power on the Quality and Residual Stress of AlN Films on Si (100) Substrates;Crystal Research and Technology;2022-02-27
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3