Voltage pulse-modulated electrochemical removal of copper surface layers using citric acid as a complexing agent
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference13 articles.
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3. Proc. 10th Interntl. Symp. Chemical Mechanical Planarization, Lake Placid;Economikos,2005
4. Citric Acid as a Complexing Agent in CMP of Copper
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