Real-time in-situ investigation of copper ultrathin films growth
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference21 articles.
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2. Properties of ultra-thin Cu films grown by high power pulsed magnetron sputtering;Solovyev;Thin Solid Films,2017
3. Electron transport properties of thin copper films. I;Suri;J. Appl. Phys.,1975
4. Electrical resistivity of Cu films deposited by ion beam deposition: Effects of grain size, impurities, and morphological defect;Lim;J. Appl. Phys.,2006
5. Conducting and reflecting properties of thin metal films;Antonets;Tech. Phys.,2004
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