Conductive and semi-transparent Cu thin film fabricated using molecular precursor solutions-Reference-Cited by-同舟云学术

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Conductive and semi-transparent Cu thin film fabricated using molecular precursor solutions

Published:2015-02 Issue: Volume:141 Page:235-237
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Nagai H.,Mita S.,Takano I.,Honda T.,Sato M.

Funder

Ministry of Education, Culture, Sports, Science and Technology of Japan (MEXT)

Strategic Research Foundation at Private Universities

Kogakuin University–Energy Conversion Ecomaterials Center

JSPS KAKENHI

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference17 articles.

1. Transparent heat mirrors for solar-energy applications;Fan;Appl Optics,1976

2. Selective and blanket electroless copper deposition for ultralarge scale integration;Dubin;J Electrochem Soc,1997

3. Palladium seeding on the tantalum-insulated silicon oxide film by plasma immersion ion implantation for the growth of electroless copper;Lin;Thin Solid Films,2000

4. Gap-filling capability and adhesion strength of the electroless-plated copper for submicron interconnect metallization;Lin;J Vac Sci Technol B,2002

5. Interfacial mechanism studies of electroless plated Cu films on a-Ta:N layers catalyzed by PIII;Lin;J Vac Sci Technol A,2002

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