Characteristics of Pb(Zr,Ti)O3 thin films deposited on Ru/RuO2 double layer
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference13 articles.
1. Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O3Films
2. Pulse switching characterization of organometallic chemical vapor deposited PbZrxTi1−xO3 thin films for high-density memory applications
3. Correlations Among Degradations in Lead Zirconate Titanate thin Film Capacitors
4. Electronic domain pinning in Pb(Zr,Ti)O3thin films and its role in fatigue
5. Phase evolution and annealing effects on the electrical properties of Pb(Zr0.53Ti0.47)O3 thin films with RuO2 electrodes
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1. Citric Acid and NaIO4 Based Alkaline Cleaning Solution for Particle Removal during Post-Ru CMP Cleaning;Journal of The Electrochemical Society;2011
2. Investigation for (100)-/(001)-Oriented Pb(Zr,Ti)O3Films Using Platinum Nanofacets and PbTiO3Seeding Layer;Japanese Journal of Applied Physics;2010-06-21
3. Effect of Film Thickness on Electrical Properties of Chemical Solution Deposition-Derived Pb(ZrxTi1-x)O3/LaNiO3/Si;Japanese Journal of Applied Physics;2007-10-22
4. Study on oxidization of Ru and its application as electrode of PZT capacitor for FeRAM;Materials Science and Engineering: B;2007-04
5. Improvement in fatigue property for a PZT ferroelectric film device with SRO electrode film prepared by chemical solution deposition;Materials Science and Engineering: B;2007-01
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