Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition

Published:2020-03 Issue: Volume:263 Page:127216
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Khomenkova L.,Chauvat M.-P.,Marie P.,Frilay C.,Lemarié F.,Boudin S.,Portier X.,Ratel-Ramond N.,Labbé C.,Cardin J.,Gourbilleau F.

Funder

Agence Nationale de la Recherche

European Regional Development Fund

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference13 articles.

1. Characteristics of electron-beam-gun-evaporated Er2O3 thin films as gate dielectrics for silicon

2. Er2O3 for high-gain waveguide amplifiers

3. Corrosion-resistant erbium oxide coatings by organometallic chemical vapor deposition

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of transition metal (TM = Mn, Co, Ni) doping on the structural, magnetic, and shielding properties of nano Er2O3;Applied Physics A;2024-07-22

2. Staggered band alignment of n-Er₂O₃/p-Si heterostructure for the fabrication of a high-performance broadband photodetector;Nano Express;2024-07-10

3. Optical and structural investigations of annealing impact on phase separation of Erbium-doped Al2O3 layers;Materials Science and Engineering: B;2023-10

4. Thermal stability and antibacterial activity of Er2O3, and Co3O4 scattered in polycaprolactone;Journal of Industrial and Engineering Chemistry;2023-03

5. Comprehensive investigation of Er2O3 thin films grown with different ALD approaches;Surfaces and Interfaces;2022-11

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3