Effect of N2 partial pressure on the microstructure and mechanical properties of reactively sputtered (Ti,Al)N coatings
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference13 articles.
1. Single layer and multilayer wear resistant coatings of (Ti,Al)N: a review
2. Structure and composition of TixAl1−xN thin films sputter deposited using a composite metallic target
3. Structural analysis of (Ti 1−x Al x )N graded coatings deposited by reactive magnetron sputtering
4. Superhard nanocomposite Ti1−xAlxN films prepared by magnetron sputtering
5. (TiAl)N advanced films prepared by arc process
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1. Effect of N2 to total pressure ratio on the structure, mechanical and tribological properties of magnetron-sputtered Ti-Al-Ta-Si-N coatings;Surface and Coatings Technology;2024-09
2. Effects of nitrogen flow rate on the microstructure and mechanical and tribological properties of TiAlN films prepared via reactive magnetron sputtering;Ceramics International;2023-06
3. Nitrogen flux effect on the mechanical properties of AlCrTiN Nanostructured coatings obtained by R. F. magnetron sputtering;Ceramics International;2023-06
4. Investigation of deposition parameters on the structural properties and hardness of TiAlN films deposited via reactive pulsed DC magnetron sputteringInvestigation of deposition parameters on structural properties and hardness of TiAlN films deposited by reactive pulsed DC magnetron sputtering;Journal of Metals, Materials and Minerals;2021-06-27
5. Investigation of deposition parameters on the structural properties and hardness of TiAlN films deposited via reactive pulsed DC magnetron sputtering;J MET MATER MINER;2021
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