Cubic boron nitride thin film synthesis on silica substrates by low-pressure inductively-coupled r.f. plasma chemical vapor deposition-Reference-Cited by-同舟云学术

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Cubic boron nitride thin film synthesis on silica substrates by low-pressure inductively-coupled r.f. plasma chemical vapor deposition

Published:1999-10 Issue:1-2 Volume:354 Page:24-28
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Chattopadhyay K.K.,Matsumoto S.,Zhang Y.-F.,Sakaguchi I.,Nishitani-Gamo M.,Ando T.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. High-Temperature Cubic Boron Nitride P-N Junction Diode Made at High Pressure

2. Ultraviolet light‐emitting diode of a cubic boron nitridepnjunction made at high pressure

3. Phase control of cubic boron nitride thin films

4. Preparation of cubic boron nitride films by radio frequency bias sputtering

5. Knock-on subplantation-induced formation of nanocrystalline c-BN with r.f. magnetron sputtering and r.f. argon ion plating

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Cubic Boron Nitride Films;Comprehensive Hard Materials;2014

2. Synthesis of c-BN films by using a low-pressure inductively coupled BF3–He–N2–H2 plasma;Diamond and Related Materials;2006-09

3. Effect of mechanical stress on the absorption band tail of cubic boron nitride thin films synthesized by inductively coupled radio-frequency plasma chemical vapour deposition;Philosophical Magazine Letters;2005-06

4. Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition;Materials Letters;2003-02

5. Electron microscopic analysis of cubic boron nitride films deposited on fused silica;Thin Solid Films;2002-04

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