Author:
Wang C.C.,Sheu Y.M.,Liu Sally,Duffy R.,Heringa A.,Cowern N.E.B.,Griffin P.B.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference10 articles.
1. Symposium on VLSI Technology Technical Digest;Shima,2002
2. International Electron Devices Meeting Technical Digest;Ghani,2003
3. International Electron Devices Meeting Technical Digest;Bai,2004
4. Effects of strain on boron diffusion in Si and Si1−xGex
5. Boron and phosphorus diffusion in strained and relaxed Si and SiGe
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