Tungsten/molybdenum thin films for application as interdigital transducers on high temperature stable piezoelectric substrates La3Ga5SiO14 and Ca3TaGa3Si2O14-Reference-Cited by-同舟云学术

Tungsten/molybdenum thin films for application as interdigital transducers on high temperature stable piezoelectric substrates La3Ga5SiO14 and Ca3TaGa3Si2O14

Published:2015-12 Issue: Volume:202 Page:31-38
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Rane Gayatri K.^ORCID,Menzel Siegfried,Seifert Marietta,Gemming Thomas,Eckert Jürgen

Funder

German BMBF

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference33 articles.

1. Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films

2. Characterization and modeling of electrical resistivity of sputtered tungsten films

3. Phase transformation of thin sputter-deposited tungsten films at room temperature

4. Controlling strength and toughness of multilayer films: A new multiscalar approach

5. Electrical and microstructural characterization of molybdenum tungsten electrodes using a combinatorial thin film sputtering technique

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