Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films-Reference-Cited by-同舟云学术

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Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films

Published:2011-09 Issue:5 Volume:29 Page:051512
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Choi Dooho,Wang Bincheng,Chung Suk,Liu Xuan,Darbal Amith,Wise Adam,Nuhfer Noel T.,Barmak Katayun,Warren Andrew P.,Coffey Kevin R.,Toney Michael F.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3622619

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