Low K dielectrics in sintered Al–Zr oxide composites processed by thermal plasma heating
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference28 articles.
1. Low dielectric constant materials for advanced interconnects
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4. Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition
5. Al2O3-ZrO2 Ceramics with Submicron Microstructures Obtained through Microwave Sintering, Plasma Sintering and Shock Compaction
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1. A new approach to synthesize ZnO tetrapod-like nanoparticles with DC thermal plasma technique;Journal of Crystal Growth;2009-02
2. Thermal plasma assisted rapid sintering of MgO-doped Al–Zr oxide composites;Materials Chemistry and Physics;2008-02
3. Extended arc thermal plasma assisted sintering of Al-Zr oxide composites;Proceedings of the Institution of Mechanical Engineers, Part L: Journal of Materials: Design and Applications;2007-01-01
4. Studies on sintering behaviour of Al2O3–ZrO2 oxide composites processed by extended arc thermal plasma and conventional heating;Journal of Materials Science;2006-09
5. THE ROLE OF HIGH PRESSURE PLASMA IN MICROWAVE SINTERING PROCESSES;Novel Materials Processing by Advanced Electromagnetic Energy Sources;2005
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