On the analysis of the activation mechanisms of sub-melt laser anneals-Reference-Cited by-同舟云学术

On the analysis of the activation mechanisms of sub-melt laser anneals

Published:2008-12 Issue: Volume:154-155 Page:24-30
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Clarysse T.,Bogdanowicz J.,Goossens J.,Moussa A.,Rosseel E.,Vandervorst W.,Petersen D.H.,Lin R.,Nielsen P.F.,Hansen Ole,Merklin G.,Bennett N.S.,Cowern N.E.B.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference14 articles.

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4. 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors–RTP2007;Hunter,2007

5. MRS 2008 Spring Meeting;Vandervorst,2008

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