Microstructures and dielectric properties of PZT thick films prepared by aerosol plasma deposition with microwave annealing
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference12 articles.
1. Fabrication and Electrical Properties of Lead Zirconate Titanate Thick Films
2. Effect of poling on piezoelectric properties of lead zirconate titanate thin films formed by sputtering
3. Analysis of Bending Displacement of Lead Zirconate Titanate Thin Film Synthesized by Hydrothermal Method
4. Novel high vacuum scanning force microscope using a piezoelectric cantilever and the phase detection method
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Annealing Mechanism and Effect of Microwave Plasma Assisted Annealing on Properties of Sputtered Pb(Zr0.52Ti0.48)O3 Thin Films;Journal of Nanoscience and Nanotechnology;2016-03-01
2. Microstructures and Dielectric Properties of PZT Coatings Prepared by Supersonic Plasma Spraying;Journal of Thermal Spray Technology;2013-11-12
3. Mechanical characterization of sintered piezo-electric ceramic material using scanning acoustic microscope;Ultrasonics;2012-12
4. Polyol based auto-combustion synthesis of nanostructured PZT and its characterization;Materials Chemistry and Physics;2008-06
5. Preparation of Highly Dense PZN–PZT Thick Films by the Aerosol Deposition Method Using Excess-PbO Powder;Journal of the American Ceramic Society;2007-11
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