Annealing Mechanism and Effect of Microwave Plasma Assisted Annealing on Properties of Sputtered Pb(Zr0.52Ti0.48)O3 Thin Films
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Published:2016-03-01
Issue:3
Volume:16
Page:2866-2871
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j nanosci nanotechnol
Author:
Wan Jing,Yang Chengtao,He Ming
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering