Properties of silicon nanolayers on insulator-Reference-Cited by-同舟云学术

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Properties of silicon nanolayers on insulator

Published:2006-12 Issue:3 Volume:135 Page:238-241
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Naumova O.V.,Vohmina E.V.,Gavrilova T.A.,Dudchenko N.V.,Nikolaev D.V.,Spesivtsev E.V.,Popov V.P.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference6 articles.

1. Frontiers of silicon-on-insulator

2. Nature of Surface and Bulk Defect Induced by Low Dose Oxygen Implantation in Separation by Implanted Oxygen Wafers

3. Nano-defects in commercial bonded SOI and SIMOX

4. Study of HF Defects in Thin, Bonded Silicon-on-Insulator Dependent on Original Wafers

5. Properties of silicon-on-insulator structures and devices

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1. Fabrication and characterization of silicon-on-insulator wafers;Micro and Nano Systems Letters;2023-11-13

2. Profiling Mobility Components near the Heterointerfaces of Thin Silicon Films;Semiconductors;2020-02

3. Ultrasoft silicon nanomembranes: thickness-dependent effective elastic modulus;Nanoscale;2019

4. An Experimental Study of Properties of Ultrathin Si Layer with Bonded Si/SiO₂ Interface;Advanced Materials Research;2013-11

5. Mechanical properties of silicon nanowires;Wiley Interdisciplinary Reviews: Computational Molecular Science;2012-06-22

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